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大气压辉光放电研究现状及应用前景
  • 摘要

    大气压辉光放电由于均匀性好、能量效率高并且不需要真空系统,正日益受到人们重视和研究.文章综述了大气压辉光放电的研究进展,包括实验条件、放电特征、放电机理以及最新的诊断方法,还介绍它在薄膜沉积、材料表面改性、污染物质的消毒去污等方面的应用前景.

  • 作者

    张锐  刘鹏  詹如娟 

  • 作者单位

    中国科学技术大学近代物理系,合肥,230026

  • 刊期

    2004年6期 ISTIC PKU

  • 关键词

    大气压辉光放电  均匀性  低温等离子体 

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